There are six work packages (WPs) in ELENA embrace the research programme.
WP1; Coordination and Management.
WP3; Outreach and Dissemination.
WP4; Synthetic and post exposure chemistry in FEBID and EUVL.
WP5; fundamentals of electron induced chemistry in FEBID and EUVL.
WP6; Nano-scale fabrication with FEBID and EUVL.
-WP1- Coordination and Management.
WPl will be led by Prof. Ing6lfsson (Ulce), supported by the Ulce Project Management Office, an ETN project manager ( 50%) and secretarial assistance ( 50%) along with the European Officer ofUice (Dr. Greta Kristjansd6ttir). The establishment of the consortium agreement is the responsibility of this group, as well as the management, accounting, documentation of activities and allocation of financial resources in accordance with the consortium agreement. WPl will further comprise the leaders of the other 5 WPs; ProfSwiderek (UBre, WP2), Prof. Mason (OU, WP3), Prof. Liska (TIN, WP4), (Prof. Ing61fsson (Ulce, WP5)), Prof. Marbach (UErl, WP6). WPl members will oversee the recruitment of all ESRs, all secondments, and ensure that all conduct is in accordance with the grant agreement, the consortium agreement, the equal opportunity policy, and other good practices.
WP2 will be led by Prof Swiderek (UBre) and will be composed of one of the scientific partners from each of the other WPs, except WPI; Prof. Mason (WP3, OU), ProfTilset. (WP4, UiO), Prof. Kopyra (WP5, SU) and Prof. Hagen (WP5 and 6, TUD), three representatives from the ESRs (one from each of the scientific WPs), as well as Elisabet Larson (CEIEurope) and Rhonda Smith (MINERVA). For ease of management Prof. Swiderek with the four WP representatives will form a core group WP2CG within WP2, which is responsible for all daily conduct but reports to all WP2 members (ongoing and formally at the biannual management meeting). The role of the scientific partners is to monitor and document all training activities and assure that these are accounted for by individual ESRs in their personal online training log. Elisabet Larson (CBI-Europe) and Rhonda Smith (MINERVA) are responsible for the organisation the nw-TTSs and nw-PSTSs, respectively, while the scientific partners are responsible for assigning and approving lecturers for the nw-TTSs and nw-PSTSs. The role of the ESRs is to evaluate individual training activities and initiate adjustments of the training plan as deemed necessary. It is the responsibility of all WP2 partners to assure that all training activities are ofhigh standard and meaningful for the personal and professional development of the individual ESRs. Additionally Dr. Edingers (Zeiss, WP6) will take an advisory role to represent the views of eventual employers from the nano-technology industry.
-WP3- Outreach and Dissemination.
WP3 will be led by Prof. Mason (OU) with Rhonda Smith (Minerva), three additional beneficiaries; one from a University, one from a research institute and one from the industrial partners will be on the Outreach and Dissemination Board ODB (nominated/elected M2) which, with two ESR representatives (Elected after recruitment), will form the Management group ofWP3. The ODB will report to the Supervisory Board (SB) (on-going through the SB core group and annually with a formal ODB activity report) and liaise with the Advisory Committee (AC) to receive advice and reports on the success and impact of its WP3 activities. Specific tasks of the WP are to; i) deliver comprehensive outreach and dissemination for ELENA by engaging with key stakeholders and the public, ii) prepare and maintain ELENA' s Website and prepare and distribute ELENA Newsletter, iii) prepare and monitor ELENA's data management plan and database, iv) support training in communication and dissemination skills and prepare the ELENA exhibition (to be used as ESOF tba 2018) and ELENA"s career fair.
-WP4- Synthetic and post exposure chemistry in FEBID and EUVL.
The focuses on the design and synthesis of new FEBID molecular precursors and EUVL resist material and the design of new and selective chemical activation within EUVL resists with the aim of promoting electron induced decomposition of FEBID precursor molecules.
The main objectives are; i) to identify (in conjunction with WP5) promising molecular compositions suitable for FEBID and EUVL, ii) to provide novel precursors for fundamental investigations on their electron-initiated reactions relevant to either FEBID or EUVL within WG 5), and for testing FEBID and in EUVL applications within WP 6. iii) Identifying routes for chemically enhanced electron induced chemistry with in situ purification as focal point in conjunction with the work conducted within WP5 and 6.
-WP5- Fundamentals of electron induced chemistry in FEBID and EUVL.
The focuses on enhanced understanding of low energy electron interaction with potential FEBID precursor and with EUV resist materials as well as the exploration of means to direct and assist chemistry to advance these nanofabrication techniques.
The main objectives are: i) to identify (in conjunction with WG4) promising molecular compositions suitable for FEBID and EUVL, ii) provide guidance for targeted molecular modifications to positively direct the electron induced chemistry in FEBIP and in EUVL, iii) seek new approaches to chemically enhance favorable electron molecule interactions with in situ processing components, and iv) explore new avenues for quantification of electron induced reactions.
-WP6- Nano-scale fabrication with FEBID and EUVL.
The current aim of photolithography is to achieve resolution of the order of 10 nm by the deployment of EUV radiation, using an exposure wavelength of 13.5 nm. Currently used chemically amplified photoresists, however, have been developed for use with UV light, and for EUVL do not deliver the required performance with regards to the key photolithographic parameters; resolution, material sensitivity, line width roughness and pattern collapse.
Likewise, the bulk of the FEBID precursors used today are drawn from an assortment of commercially available CVD precursors. These compounds are typically not perfect for FEBID as they were developed and optimized for thermally induced decomposition. By attaining control over the electron induced chemistry using specifically tailoring FEBID molecules we intend to advance FEBID to a commercially viable technology well beyond that of its current commercial use for mask repair.
Importantly, the chemistries of EUVL and FEBID materials are governed by the same principles, and we postulate that it is possible to apply the same or similar approaches to both fields. The main objective of WP6 is thus to identify and apply materials and methods to bring both FEBID and EUVL beyond their current limitations. Hence, WP6 will exchange knowledge and new materials with participants in WP4 and WP5 in order to advance these two nanofabrication technologies.